MAIN PARAMETERS

Ultimate Vacuum: 6.0x10-4Pa(No Load)

Pressure Rising Rate: 0.67Pa/h

Pumping Time: From Atmosphere To 6.0x10-3Pa About 15 Minutes

Pumping System: Diffusion Pump/Turbo Pump+Roots Pump+Roughing Pump+Holding Pump

Control System: Manual, Semi-Auto, Full Auto

Coating Cycle: From Loading To Unloading is 1 Cycle, About 15Minutes/Cycie

Other Accessory Equipment: UV Line/Nano Spray Gun, WaterCurtain Cabinet,Oven,Cleaning Tools,Leveling Machine. etc.