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Magnetron Sputtering Vacuum Coating Machine
Features and functions

MAIN PARAMETERS


Uitimate Vacuum:6.0x10-4Pa(No Load)

Pressure Rising Rate:0.67Pa/h

Pumping System: Diffuslon Pump/Turbo Pump+ RootsPump+Roughing Pump+Holding Pump

Conirol System: Manual, Seml-Auto, Full Auto


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